The 2nd Workshop on AI for Semiconductor Processing
Korea–Japan Joint Research (NRF–JST SICORP) · 2nd-year workshop
- Date
- November 12 (Thu) 13:30 – November 13 (Fri) 17:25, 2026
- Venue
- Room 310-2, UNIST, Ulsan, Republic of Korea · hybrid on Zoom
- Format
- 30 min per talk (20 + 10 discussion), in English. Zoom link shared with registered participants.
Organized by VDLab, UNIST (Prof. Byungjo Kim) with Osaka University (Prof. Satoshi Hamaguchi) and the Institute of Statistical Mathematics (Prof. Stephen Wu).
Download poster (PDF)Program
Thursday, November 12AI for Process Development
| 13:30 | Byungjo Kim (UNIST)Opening and project progress |
|---|---|
| 13:45 | Jisu Jung (Pukyong National University)Extending Atomistic Simulation in Time and Chemical Space with Machine Learning |
| 14:15 | Dongheon Oh (UNIST)Same Aldehyde, Different Inhibitor: Molecular Size and Tail Architecture in Area-Selective ALD |
| 14:45 | Wonjoong Kim (UNIST)From Bulk to Thin Films: AI-Driven Discovery of High-k Dielectric Materials |
| 15:15 | Break |
| 15:45 | Stephen Wu (Institute of Statistical Mathematics)TBA |
| 16:15 | Youngmin Sunwoo (UNIST)Agentic AI-Assisted Multiscale Simulation Framework for Plasma Etching |
| 16:45 | Discussion: knowledge graphs and agentic AI |
| 17:30 | Adjourn |
Friday, November 13Atomistic Simulation of Growth, Surfaces, and Interfaces
| 10:00 | Satoshi Hamaguchi (Osaka University)TBA |
|---|---|
| 10:30 | Speaker from Osaka University (to be confirmed) |
| 11:00 | Break |
| 11:20 | Eunhyeok Heo (UNIST)Development of a Machine Learning Interatomic Potential for Cryogenic Etching |
| 11:50 | Paul Seo (UNIST)Explainable Multimodal Learning with LLM Interpretation Toward Optimization of SiN/SiO₂ Etching |
| 12:20 | Lunch |
| 13:50 | Hyeong-U Kim (Korea Institute of Machinery and Materials, online)Intelligent Plasma Processing for Next-Generation 2D Semiconductors: Wafer-Scale Synthesis, Atomic Layer Etching, and Uncertainty-Aware In-Situ Monitoring |
| 14:20 | Hadi Ghaffarian (UNIST)Tuning Interfacial Strain in MoS₂/GaN Heterostructures through GaN Facet Engineering |
| 14:50 | Yang Jeong Park (UNIST)Toward Accelerated Quantum Mechanical Property Prediction via Deep Learning |
| 15:20 | Sangmin Eom (UNIST)Surface Chemistry Effects on SAM Formation on NiO for Perovskite Solar Cells: An Atomistic Study |
| 15:50 | Break |
| 16:10 | Project roadmap discussion |
| 17:10 | Byungjo Kim (UNIST)Closing |
| 17:25 | Adjourn |